Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823566 | Monomer, hardmask composition comprising monomer, and pattern forming method using hardmask composition | Yong-Woon Yoon, Sung Jae Lee, You-Jung Park, Chul-Ho Lee, Youn-Jin Cho | 2017-11-21 |
| 9683114 | Monomer for hardmask composition, hardmask composition including the monomer, and method of forming patterns using the hardmask composition | Hea-Jung Kim, Sung Hwan Kim, Youn-Hee Nam, Yun-Jun Kim, Hyun-Ji SONG +2 more | 2017-06-20 |
| 9665003 | Hardmask composition, method of forming patterns using the hardmask composition and semiconductor integrated circuit device including the patterns | Yoo-Jeong Choi, Yun-Jun Kim, Go-Un Kim, Young Min Kim, Hea-Jung Kim +8 more | 2017-05-30 |