Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9683114 | Monomer for hardmask composition, hardmask composition including the monomer, and method of forming patterns using the hardmask composition | Hea-Jung Kim, Sung Hwan Kim, Yun-Jun Kim, Joon-Young Moon, Hyun-Ji SONG +2 more | 2017-06-20 |
| 9568825 | Hardmask composition and method of forming patterns using the hardmask composition | Hea-Jung Kim, Hyun-Ji SONG | 2017-02-14 |