Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823566 | Monomer, hardmask composition comprising monomer, and pattern forming method using hardmask composition | Sung Jae Lee, Joon-Young Moon, You-Jung Park, Chul-Ho Lee, Youn-Jin Cho | 2017-11-21 |
| 9725389 | Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition | Yun-Jun Kim, Hwan-Sung Cheon, Youn-Jin Cho, Chung-Heon Lee, Hyo-Young Kwon +1 more | 2017-08-08 |
| 9683114 | Monomer for hardmask composition, hardmask composition including the monomer, and method of forming patterns using the hardmask composition | Hea-Jung Kim, Sung Hwan Kim, Youn-Hee Nam, Yun-Jun Kim, Joon-Young Moon +2 more | 2017-06-20 |
| 9665003 | Hardmask composition, method of forming patterns using the hardmask composition and semiconductor integrated circuit device including the patterns | Yoo-Jeong Choi, Yun-Jun Kim, Go-Un Kim, Young Min Kim, Hea-Jung Kim +8 more | 2017-05-30 |