| 9758612 |
Polymer, organic layer composition, organic layer, and method of forming patterns |
Ran NAMGUNG, Seung Hyun Kim, Dominea RATHWELL, Soo-Hyoun Mun, Hyeon-Il Jung +1 more |
2017-09-12 |
| 9725389 |
Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition |
Yun-Jun Kim, Hwan-Sung Cheon, Youn-Jin Cho, Yong-Woon Yoon, Chung-Heon Lee +1 more |
2017-08-08 |
| 9606438 |
Resist underlayer composition, method of forming patterns, and semiconductor integrated circuit device including the pattern |
Min Gyum KIM, Jun Ho Lee, Hwan-Sung Cheon |
2017-03-28 |
| 9593205 |
Polymer, organic layer composition, organic layer, and method of forming patterns |
Soo-Hyoun Mun, Seung Hyun Kim, Ran NAMGUNG, Dominea RATHWELL, Hyeon-Il Jung +1 more |
2017-03-14 |
| 9556094 |
Monomer, hardmask composition including monomer, and method for forming pattern by using hardmask composition |
Yun-Jun Kim, Hea-Jung Kim, Chung-Heon Lee, Youn-Jin Cho, Yoo-Jeong Choi |
2017-01-31 |
