Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9760019 | Projection exposure apparatus comprising a manipulator, and method for controlling a projection exposure apparatus | Boris Bittner | 2017-09-12 |
| 9746778 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2017-08-29 |
| 9720336 | Microlithographic apparatus and method of varying a light irradiance distribution | Alexander Wolf | 2017-08-01 |