Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9759550 | Projection exposure apparatus for microlithography comprising an optical distance measurement system | Markus Schwab, Toralf Gruner, Joachim Hartjes | 2017-09-12 |
| 9720336 | Microlithographic apparatus and method of varying a light irradiance distribution | Holger Walter | 2017-08-01 |
| 9546052 | Method for transporting expanded thermoplastic polymer particles | Markus Buscher, Gerhard Weis, Jürgen Bartl, Christian Obermann | 2017-01-17 |