Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9759550 | Projection exposure apparatus for microlithography comprising an optical distance measurement system | Alexander Wolf, Toralf Gruner, Joachim Hartjes | 2017-09-12 |
| 9678438 | Illumination system of a microlithographic projection exposure apparatus | Michael Patra | 2017-06-13 |
| 9535331 | Optical system for a microlithographic projection exposure apparatus | Michael Patra, Johannes Eisenmenger | 2017-01-03 |