Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846375 | Lithography apparatus with segmented mirror | — | 2017-12-19 |
| 9759550 | Projection exposure apparatus for microlithography comprising an optical distance measurement system | Alexander Wolf, Markus Schwab, Toralf Gruner | 2017-09-12 |
| 9684243 | Blocking element for protecting optical elements in projection exposure apparatuses | Bernhard Sitek, Guenther Dengel, Maik-René Piatkowski | 2017-06-20 |
| 9671584 | Method and cooling system for cooling an optical element for EUV applications | Guenther Dengel | 2017-06-06 |
| 9599910 | Facet mirror device | — | 2017-03-21 |