Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9684243 | Blocking element for protecting optical elements in projection exposure apparatuses | Joachim Hartjes, Guenther Dengel, Maik-René Piatkowski | 2017-06-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9684243 | Blocking element for protecting optical elements in projection exposure apparatuses | Joachim Hartjes, Guenther Dengel, Maik-René Piatkowski | 2017-06-20 |