Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9684243 | Blocking element for protecting optical elements in projection exposure apparatuses | Joachim Hartjes, Bernhard Sitek, Maik-René Piatkowski | 2017-06-20 |
| 9671584 | Method and cooling system for cooling an optical element for EUV applications | Joachim Hartjes | 2017-06-06 |