Issued Patents 2016
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524876 | Plasma etching method and plasma etching apparatus | Toru Hisamatsu | 2016-12-20 |
| 9460893 | Substrate processing apparatus | Masaya Kawamata, Kazuhiro Kubota | 2016-10-04 |
| 9396962 | Etching method | Keiji Kitagaito, Takayuki Katsunuma | 2016-07-19 |
| 9390935 | Etching method | Maju TOMURA, Hikaru Watanabe, Fumiya Kobayashi, Kazuhiro Kubota | 2016-07-12 |
| 9362090 | Plasma processing apparatus, plasma processing method, and storage medium | Yutaka Matsui, Manabu Sato | 2016-06-07 |
| 9349619 | Plasma etching method and plasma etching apparatus | Masaya Kawamata, Kazuhiro Kubota | 2016-05-24 |
| 9330973 | Workpiece processing method | Hikaru Watanabe, Akihiro Tsuji | 2016-05-03 |
| 9330935 | Plasma etching method and plasma etching apparatus | Toru Hisamatsu, Yoshihide Kihara | 2016-05-03 |
| 9330930 | Plasma etching method and semiconductor device manufacturing method | Kazuhiro Kubota, Takayuki Katsunuma | 2016-05-03 |
| 9318340 | Method of manufacturing a semiconductor device | Takayuki Katsunuma, Kazuhiro Kubota, Hironobu Ichikawa | 2016-04-19 |
| 9299579 | Etching method and plasma processing apparatus | Maju TOMURA, Hikaru Watanabe, Takahiko Kato | 2016-03-29 |