Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460897 | Plasma etching method and plasma etching apparatus | — | 2016-10-04 |
| 9396962 | Etching method | Keiji Kitagaito, Masanobu Honda | 2016-07-19 |
| 9330930 | Plasma etching method and semiconductor device manufacturing method | Kazuhiro Kubota, Masanobu Honda | 2016-05-03 |
| 9318340 | Method of manufacturing a semiconductor device | Masanobu Honda, Kazuhiro Kubota, Hironobu Ichikawa | 2016-04-19 |