Issued Patents 2016
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460893 | Substrate processing apparatus | Masaya Kawamata, Masanobu Honda | 2016-10-04 |
| 9396968 | Etching method and etching apparatus | — | 2016-07-19 |
| 9390935 | Etching method | Maju TOMURA, Hikaru Watanabe, Fumiya Kobayashi, Masanobu Honda | 2016-07-12 |
| 9385498 | Crimp machine and crimp system | Shuuji Satake, Akiyoshi Kanazawa, Ken Ito, Yoshimitsu Maejima, Kazuya Tsubaki | 2016-07-05 |
| 9349619 | Plasma etching method and plasma etching apparatus | Masaya Kawamata, Masanobu Honda | 2016-05-24 |
| 9330930 | Plasma etching method and semiconductor device manufacturing method | Masanobu Honda, Takayuki Katsunuma | 2016-05-03 |
| 9318340 | Method of manufacturing a semiconductor device | Takayuki Katsunuma, Masanobu Honda, Hironobu Ichikawa | 2016-04-19 |
| 9279184 | Method of forming a pattern and substrate processing system | Ryukichi Shimizu | 2016-03-08 |
| 9257301 | Method of etching silicon oxide film | Masahiro Ogasawara, Masafumi Urakawa, Yoshinobu Hayakawa, Hikaru Watanabe | 2016-02-09 |