Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530657 | Method of processing substrate and substrate processing apparatus | Masafumi Urakawa, Rui Takahashi | 2016-12-27 |
| 9257301 | Method of etching silicon oxide film | Masafumi Urakawa, Yoshinobu Hayakawa, Kazuhiro Kubota, Hikaru Watanabe | 2016-02-09 |