Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9390935 | Etching method | Hikaru Watanabe, Fumiya Kobayashi, Kazuhiro Kubota, Masanobu Honda | 2016-07-12 |
| 9299579 | Etching method and plasma processing apparatus | Hikaru Watanabe, Takahiko Kato, Masanobu Honda | 2016-03-29 |