Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502219 | Plasma processing method | Yoshihide Kihara, Toshio Haga | 2016-11-22 |
| 9460893 | Substrate processing apparatus | Masanobu Honda, Kazuhiro Kubota | 2016-10-04 |
| 9349619 | Plasma etching method and plasma etching apparatus | Masanobu Honda, Kazuhiro Kubota | 2016-05-24 |