Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502219 | Plasma processing method | Masaya Kawamata, Toshio Haga | 2016-11-22 |
| 9330935 | Plasma etching method and plasma etching apparatus | Toru Hisamatsu, Masanobu Honda | 2016-05-03 |