Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524876 | Plasma etching method and plasma etching apparatus | Masanobu Honda | 2016-12-20 |
| 9330935 | Plasma etching method and plasma etching apparatus | Masanobu Honda, Yoshihide Kihara | 2016-05-03 |