Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9519227 | Metrology for measurement of photosensitizer concentration within photo-sensitized chemically-amplified resist (PS-CAR) | Michael A. Carcasi, Joshua Hooge, Benjamen M. Rathsack, Seiji Nagahara | 2016-12-13 |
| 9454081 | Line pattern collapse mitigation through gap-fill material application | Benjamen M. Rathsack, Ian J. Brown, Steven Scheer, Joshua Hooge | 2016-09-27 |
| 9418860 | Use of topography to direct assembly of block copolymers in grapho-epitaxial applications | Makoto Muramatsu, Benjamen M. Rathsack, Tadatoshi Tomita, Hisashi Genjima, Hidetami Yaegashi +1 more | 2016-08-16 |
| 9412611 | Use of grapho-epitaxial directed self-assembly to precisely cut lines | Benjamen M. Rathsack | 2016-08-09 |
| 9349604 | Use of topography to direct assembly of block copolymers in grapho-epitaxial applications | Benjamen M. Rathsack | 2016-05-24 |