Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9519227 | Metrology for measurement of photosensitizer concentration within photo-sensitized chemically-amplified resist (PS-CAR) | Mark H. Somervell, Joshua Hooge, Benjamen M. Rathsack, Seiji Nagahara | 2016-12-13 |
| 9383138 | Methods and heat treatment apparatus for uniformly heating a substrate during a bake process | Steven Scheer | 2016-07-05 |