Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9519227 | Metrology for measurement of photosensitizer concentration within photo-sensitized chemically-amplified resist (PS-CAR) | Michael A. Carcasi, Mark H. Somervell, Joshua Hooge, Benjamen M. Rathsack | 2016-12-13 |
| 9500936 | Light source device, and optical engine in which light source device is used | — | 2016-11-22 |
| 9459520 | Light source unit and optical engine | Takashi Sasamuro, Eiichiro Okahisa | 2016-10-04 |