Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9454081 | Line pattern collapse mitigation through gap-fill material application | Mark H. Somervell, Benjamen M. Rathsack, Ian J. Brown, Joshua Hooge | 2016-09-27 |
| 9383138 | Methods and heat treatment apparatus for uniformly heating a substrate during a bake process | Michael A. Carcasi | 2016-07-05 |