Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513556 | Method and system of process chemical temperature control using an injection nozzle | Wallace P. Printz | 2016-12-06 |
| 9454081 | Line pattern collapse mitigation through gap-fill material application | Mark H. Somervell, Benjamen M. Rathsack, Steven Scheer, Joshua Hooge | 2016-09-27 |
| 9327322 | Sonic energy to generate active species for surface preparation, cleaning, and etching | — | 2016-05-03 |
| 9257292 | Etch system and method for single substrate processing | Wallace P. Printz | 2016-02-09 |