Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513556 | Method and system of process chemical temperature control using an injection nozzle | Ian J. Brown | 2016-12-06 |
| 9257292 | Etch system and method for single substrate processing | Ian J. Brown | 2016-02-09 |