TT

Tadatoshi Tomita

TL Tokyo Electron Limited: 2 patents #101 of 758Top 15%
Overall (2016): #93,806 of 481,213Top 20%
2
Patents 2016

Issued Patents 2016

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
9530645 Pattern forming method, pattern forming apparatus, and non-transitory computer-readable storage medium Makoto Muramatsu, Takahiro Kitano, Keiji Tanouchi 2016-12-27
9418860 Use of topography to direct assembly of block copolymers in grapho-epitaxial applications Mark H. Somervell, Makoto Muramatsu, Benjamen M. Rathsack, Hisashi Genjima, Hidetami Yaegashi +1 more 2016-08-16