Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520362 | Semiconductor device having interconnect layer that includes dielectric segments interleaved with metal components | Chun-Chieh Lin, Hung-Wen Su, Ming-Hsing Tsai | 2016-12-13 |
| 9515188 | Fin field effect transistors having conformal oxide layers and methods of forming same | Chia-Cheng Chen, Meng-Shu Lin, Liang-Yin Chen, Xiong-Fei Yu, Hui-Cheng Chang | 2016-12-06 |
| 9461144 | Method for semiconductor device fabrication | Ming-Hsi Yeh, Hsin-Yan Lu, Chao-Cheng Chen | 2016-10-04 |
| 9355874 | Silicon nitride etching in a single wafer apparatus | Weibo Yu, Hsueh-Chin Lu, Han-Guan Chew, Kuo-Bin Huang, Chao-Cheng Chen | 2016-05-31 |
| 9281196 | Method to reduce etch variation using ion implantation | Tsan-Chun Wang, Ziwei Fang, Chii-Horng Li, Tze-Liang Lee, Chao-Cheng Chen | 2016-03-08 |
| 9269612 | Mechanisms of forming damascene interconnect structures | Chien-An Chen, Wen-Jiun Liu, Chun-Chieh Lin, Hung-Wen Su, Ming-Hsing Tsai | 2016-02-23 |