Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362124 | Method of patterning a metal gate of semiconductor device | Chien-Hao Chen, Shun Wu Lin, Chi-Chun Chen, Ryan Chia-Jen Chen, Yi-Hsing Chen +2 more | 2016-06-07 |
| 9355874 | Silicon nitride etching in a single wafer apparatus | Weibo Yu, Hsueh-Chin Lu, Han-Guan Chew, Chao-Cheng Chen, Syun-Ming Jang | 2016-05-31 |