Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355874 | Silicon nitride etching in a single wafer apparatus | Weibo Yu, Hsueh-Chin Lu, Kuo-Bin Huang, Chao-Cheng Chen, Syun-Ming Jang | 2016-05-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355874 | Silicon nitride etching in a single wafer apparatus | Weibo Yu, Hsueh-Chin Lu, Kuo-Bin Huang, Chao-Cheng Chen, Syun-Ming Jang | 2016-05-31 |