Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9316921 | Exposure apparatus, exposure method, and method for producing device | Naoyuki Kobayashi, Shigeru Hirukawa, Yasuhiro Omura | 2016-04-19 |
| 9310520 | Optical material, optical element, and method for manufacturing same | Shunji Watanabe, Junji Suzuki, Kazuhiro Kido, Hidemitsu Toba | 2016-04-12 |
| 9291814 | Spatial light modulator, exposure apparatus, and method for manufacturing device | Yoji Watanabe, Tomoharu Fujiwara | 2016-03-22 |
| 9268235 | Controller for optical device, exposure method and apparatus, and method for manufacturing device | — | 2016-02-23 |
| 9268237 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue, Hirotaka Kohno +6 more | 2016-02-23 |
| 9239525 | Pattern forming method and apparatus, exposure method and apparatus, and device manufacturing method and device | — | 2016-01-19 |