Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9488920 | Exposure method, exposure apparatus, and method for producing device | — | 2016-11-08 |
| 9316921 | Exposure apparatus, exposure method, and method for producing device | Naoyuki Kobayashi, Soichi Owa, Yasuhiro Omura | 2016-04-19 |
| 9268237 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Yoshihiko Kudo, Jiro Inoue, Hirotaka Kohno +6 more | 2016-02-23 |