Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494871 | Exposure apparatus, method for producing device, and method for controlling exposure apparatus | Naoyuki Kobayashi | 2016-11-15 |
| 9268237 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue, Hirotaka Kohno +6 more | 2016-02-23 |