Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494871 | Exposure apparatus, method for producing device, and method for controlling exposure apparatus | Nobutaka Magome | 2016-11-15 |
| 9316921 | Exposure apparatus, exposure method, and method for producing device | Soichi Owa, Shigeru Hirukawa, Yasuhiro Omura | 2016-04-19 |
| 9304392 | Exposure apparatus and method for producing device | Akikazu Tanimoto | 2016-04-05 |