Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9500943 | Projection optical system, exposure apparatus, and exposure method | — | 2016-11-22 |
| 9429851 | Projection optical system, exposure apparatus, and exposure method | Takaya Okada, Hiroyuki Nagasaka | 2016-08-30 |
| 9360763 | Projection optical system, exposure apparatus, and exposure method | Takaya Okada, Hiroyuki Nagasaka | 2016-06-07 |
| 9316921 | Exposure apparatus, exposure method, and method for producing device | Naoyuki Kobayashi, Soichi Owa, Shigeru Hirukawa | 2016-04-19 |
| 9310696 | Projection optical system, exposure apparatus, and exposure method | Takaya Okada, Hiroyuki Nagasaka | 2016-04-12 |