Issued Patents 2016
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529273 | Exposure apparatus, exposure method, and method for producing device | Takeshi Okuyama | 2016-12-27 |
| 9500959 | Exposure apparatus and device manufacturing method | Takeshi Okuyama | 2016-11-22 |
| 9429851 | Projection optical system, exposure apparatus, and exposure method | Yasuhiro Omura, Takaya Okada | 2016-08-30 |
| 9411247 | Exposure apparatus, exposure method, and method for producing device | Minoru Onda | 2016-08-09 |
| 9360763 | Projection optical system, exposure apparatus, and exposure method | Yasuhiro Omura, Takaya Okada | 2016-06-07 |
| 9354525 | Exposure method, exposure apparatus, and method for producing device | — | 2016-05-31 |
| 9348239 | Exposure apparatus, exposure method, and method for producing device | — | 2016-05-24 |
| 9310696 | Projection optical system, exposure apparatus, and exposure method | Yasuhiro Omura, Takaya Okada | 2016-04-12 |
| 9285684 | Exposure method, exposure apparatus, and method for producing device | — | 2016-03-15 |
| 9268237 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2016-02-23 |
| 9256137 | Exposure apparatus, liquid holding method, and device manufacturing method | — | 2016-02-09 |
| 9239524 | Exposure condition determination method, exposure method, exposure apparatus, and device manufacturing method involving detection of the situation of a liquid immersion region | Yoshiki Kida | 2016-01-19 |