Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9420199 | Imaging device and control method for imaging device | — | 2016-08-16 |
| 9291814 | Spatial light modulator, exposure apparatus, and method for manufacturing device | Soichi Owa, Tomoharu Fujiwara | 2016-03-22 |