Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9335639 | Exposure method, exposure apparatus, and device manufacturing method | Kenichi Shiraishi, Ryuichi Hoshika | 2016-05-10 |
| 9291814 | Spatial light modulator, exposure apparatus, and method for manufacturing device | Soichi Owa, Yoji Watanabe | 2016-03-22 |