Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494862 | Resist underlayer film forming composition containing silicon having sulfone structure and amine structure | Yuta Kanno, Kenji Takase, Makoto Nakajima, Hiroyuki Wakayama | 2016-11-15 |
| 9384977 | Method of manufacturing semiconductor device using organic underlayer film forming composition for solvent development lithography process | Yasunobu Someya, Keisuke Hashimoto, Tetsuya Shinjo, Rikimaru Sakamoto | 2016-07-05 |
| 9228248 | Method of recovering rare-earth elements | Kaoru Sugita, Yasushi Kobayashi, Yoshihiro Taguchi, Yuji Ota, Masashi Ojiri +2 more | 2016-01-05 |