Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524871 | Silicon-containing resist underlayer film-forming composition having sulfone structure | Makoto Nakajima, Daisuke SAKUMA, Takahiro Kishioka | 2016-12-20 |
| 9494862 | Resist underlayer film forming composition containing silicon having sulfone structure and amine structure | Kenji Takase, Makoto Nakajima, Satoshi Takeda, Hiroyuki Wakayama | 2016-11-15 |
| 9290623 | Composition for forming silicon-containing resist underlayer film having cyclic diester group | Daisuke SAKUMA, Kenji Takase, Makoto Nakajima, Shuhei Shigaki | 2016-03-22 |
| 9291900 | Composition for forming resist underlayer film, containing silicon that bears diketone-structure-containing organic group | Daisuke SAKUMA, Makoto Nakajima | 2016-03-22 |