Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524871 | Silicon-containing resist underlayer film-forming composition having sulfone structure | Makoto Nakajima, Daisuke SAKUMA, Yuta Kanno | 2016-12-20 |
| 9436085 | Composition for forming photosensitive resist underlayer film | Yusuke Horiguchi, Makiko Umezaki, Noriaki Fujitani, Hirokazu Nishimaki, Takahiro Hamada | 2016-09-06 |
| 9348222 | Positive resist composition and method for production of microlens | Shojiro Yukawa, Takahiro Sakaguchi, Hiroyuki Soda | 2016-05-24 |
| 9340561 | Organic silicon compound and silane coupling agent containing the same | Makiko Umezaki, Daisuke SAKUMA, Taito Nishino, Yoshiomi Hiroi, Shigeo Kimura +2 more | 2016-05-17 |