Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524871 | Silicon-containing resist underlayer film-forming composition having sulfone structure | Makoto Nakajima, Yuta Kanno, Takahiro Kishioka | 2016-12-20 |
| 9340561 | Organic silicon compound and silane coupling agent containing the same | Makiko Umezaki, Taito Nishino, Takahiro Kishioka, Yoshiomi Hiroi, Shigeo Kimura +2 more | 2016-05-17 |
| 9290623 | Composition for forming silicon-containing resist underlayer film having cyclic diester group | Yuta Kanno, Kenji Takase, Makoto Nakajima, Shuhei Shigaki | 2016-03-22 |
| 9291900 | Composition for forming resist underlayer film, containing silicon that bears diketone-structure-containing organic group | Yuta Kanno, Makoto Nakajima | 2016-03-22 |