Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9337052 | Silicon-containing EUV resist underlayer film forming composition | Hiroaki Yaguchi, Rikimaru Sakamoto, Bang-Ching Ho | 2016-05-10 |
| 9290623 | Composition for forming silicon-containing resist underlayer film having cyclic diester group | Yuta Kanno, Daisuke SAKUMA, Kenji Takase, Makoto Nakajima | 2016-03-22 |