Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520302 | Methods for controlling Fin recess loading | Sean S. Kang, Kwang Soo Kim, Olivier Luere | 2016-12-13 |
| 9478433 | Cyclic spacer etching process with improved profile control | Qingjun Zhou, Tom Choi, Sean S. Kang, Jeremiah T. Pender, Srinivas D. Nemani +1 more | 2016-10-25 |
| 9368369 | Methods for forming a self-aligned contact via selective lateral etch | Sean S. Kang | 2016-06-14 |
| 9293568 | Method of fin patterning | — | 2016-03-22 |