| 9529182 |
193nm laser and inspection system |
Yung-Ho Alex Chuang, J. Joseph Armstrong, Yujun Deng, Justin Dianhuan Liou, Vladimir Dribinski |
2016-12-27 |
| 9525265 |
Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms |
Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng |
2016-12-20 |
| 9509112 |
CW DUV laser with improved stability |
Yung-Ho Alex Chuang, Xiaoxu Lu |
2016-11-29 |
| 9494531 |
Multi-spot illumination for improved detection sensitivity |
Yung-Ho Alex Chuang, Xiaoxu Lu, Ivan Maleev |
2016-11-15 |
| 9496425 |
Back-illuminated sensor with boron layer |
Jehn-Huar Chern, Ali R. Ehsani, Gildardo Delgado, David L. Brown, Yung-Ho Alex Chuang |
2016-11-15 |
| 9478402 |
Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor |
Yung-Ho Alex Chuang, David L. Brown |
2016-10-25 |
| 9460886 |
High resolution high quantum efficiency electron bombarded CCD or CMOS imaging sensor |
Ximan Jiang, Stephen Biellak |
2016-10-04 |
| 9448184 |
Method and system for determining one or more optical characteristics of structure of a semiconductor wafer |
Xuefeng Liu, Yung-Ho Alex Chuang |
2016-09-20 |
| 9419407 |
Laser assembly and inspection system using monolithic bandwidth narrowing apparatus |
Yujun Deng, J. Joseph Armstrong, Yung-Ho Alex Chuang, Vladimir Dribinski |
2016-08-16 |
| 9410901 |
Image sensor, an inspection system and a method of inspecting an article |
Yung-Ho Alex Chuang, Jingjing Zhang |
2016-08-09 |
| 9347890 |
Low-noise sensor and an inspection system using a low-noise sensor |
David L. Brown, Yung-Ho Alex Chuang |
2016-05-24 |
| 9318869 |
193nm laser and inspection system |
Yung-Ho Alex Chuang, J. Joseph Armstrong, Vladimir Dribinski, Yujun Deng |
2016-04-19 |