Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9329500 | Lithographic apparatus configured to reconstruct an aerial pattern and to compare the reconstructed aerial pattern with an aerial pattern detected by an image sensor | Joeri Lof, Erik Roelof Loopstra, Wim Tjibbo Tel, Bearrach Moest | 2016-05-03 |
| 9280064 | Lithographic method and apparatus | Peter David Engblom, Carsten Kohler, Laurentius Cornelius De Winter | 2016-03-08 |
| 9229340 | Lithographic apparatus | Engelbertus Antonius Fransiscus Van Der Pasch, Joost Jeroen Ottens, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, William Peter Van Drent +2 more | 2016-01-05 |