Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418859 | Plasma-enhanced etching in an augmented plasma processing system | Eric A. Hudson, Rajinder Dhindsa | 2016-08-16 |
| 9281166 | Plasma processing chamber for bevel edge processing | Yunsang Kim | 2016-03-08 |
| 9275838 | Arrangements for manipulating plasma confinement within a plasma processing system and methods thereof | Eller Y. Juco, Neungho Shin, Yunsang Kim | 2016-03-01 |
| 9263240 | Dual zone temperature control of upper electrodes | Alexei Marakhtanov, Rajinder Dhindsa, Ryan Bise, Lumin Li, Sang Ki Nam +5 more | 2016-02-16 |