Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449812 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Donald F. Canaperi, Alfred Grill, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini +1 more | 2016-09-20 |
| 9312224 | Interconnect structure containing a porous low k interconnect dielectric/dielectric cap | Donald F. Canaperi, Alfred Grill, Thomas J. Haigh, Jr., Son V. Nguyen, Takeshi Nogami +2 more | 2016-04-12 |