Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443765 | Water soluble mask formation by dry film vacuum lamination for laser and plasma dicing | Wei-Sheng Lei, James S. Papanu, Brad Eaton, Ajay Kumar | 2016-09-13 |
| 9412619 | Method of outgassing a mask material deposited over a workpiece in a process tool | Wei-Sheng Lei, Martin S. Wohlert, James S. Papanu, Brad Eaton, Ajay Kumar | 2016-08-09 |
| 9355907 | Hybrid wafer dicing approach using a line shaped laser beam profile laser scribing process and plasma etch process | Wei-Sheng Lei, Jungrae Park, James S. Papanu, Brad Eaton, Ajay Kumar | 2016-05-31 |
| 9349648 | Hybrid wafer dicing approach using a rectangular shaped two-dimensional top hat laser beam profile or a linear shaped one-dimensional top hat laser beam profile laser scribing process and plasma etch process | Wei-Sheng Lei, Jungrae Park, Brad Eaton, Ajay Kumar | 2016-05-24 |
| 9309591 | Methods of depositing thin films using molybdenum sputtering targets | Brad Lemon, Joseph Hirt, Timothy Welling, James G. Daily, III, David Meendering +5 more | 2016-04-12 |
| 9312177 | Screen print mask for laser scribe and plasma etch wafer dicing process | Brad Eaton, Wei-Sheng Lei, James S. Papanu, Ajay Kumar | 2016-04-12 |