Prabhat Kumar — 6 Patents at H.C. Starck

Issued Patents 2016

Showing 1–6 of 6 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
9443765	Water soluble mask formation by dry film vacuum lamination for laser and plasma dicing	Wei-Sheng Lei, James S. Papanu, Brad Eaton, Ajay Kumar	2016-09-13	$19,510,000
9412619	Method of outgassing a mask material deposited over a workpiece in a process tool	Wei-Sheng Lei, Martin S. Wohlert, James S. Papanu, Brad Eaton, Ajay Kumar	2016-08-09	$15,983,000
9355907	Hybrid wafer dicing approach using a line shaped laser beam profile laser scribing process and plasma etch process	Wei-Sheng Lei, Jungrae Park, James S. Papanu, Brad Eaton, Ajay Kumar	2016-05-31	$8,928,000
9349648	Hybrid wafer dicing approach using a rectangular shaped two-dimensional top hat laser beam profile or a linear shaped one-dimensional top hat laser beam profile laser scribing process and plasma etch process	Wei-Sheng Lei, Jungrae Park, Brad Eaton, Ajay Kumar	2016-05-24	$18,549,000
9309591	Methods of depositing thin films using molybdenum sputtering targets	Brad Lemon, Joseph Hirt, Timothy Welling, James G. Daily, III, David Meendering +5 more	2016-04-12
9312177	Screen print mask for laser scribe and plasma etch wafer dicing process	Brad Eaton, Wei-Sheng Lei, James S. Papanu, Ajay Kumar	2016-04-12	$12,337,000