| 9443765 |
Water soluble mask formation by dry film vacuum lamination for laser and plasma dicing |
Wei-Sheng Lei, James S. Papanu, Brad Eaton, Ajay Kumar |
2016-09-13 |
| 9412619 |
Method of outgassing a mask material deposited over a workpiece in a process tool |
Wei-Sheng Lei, Martin S. Wohlert, James S. Papanu, Brad Eaton, Ajay Kumar |
2016-08-09 |
| 9355907 |
Hybrid wafer dicing approach using a line shaped laser beam profile laser scribing process and plasma etch process |
Wei-Sheng Lei, Jungrae Park, James S. Papanu, Brad Eaton, Ajay Kumar |
2016-05-31 |
| 9349648 |
Hybrid wafer dicing approach using a rectangular shaped two-dimensional top hat laser beam profile or a linear shaped one-dimensional top hat laser beam profile laser scribing process and plasma etch process |
Wei-Sheng Lei, Jungrae Park, Brad Eaton, Ajay Kumar |
2016-05-24 |
| 9309591 |
Methods of depositing thin films using molybdenum sputtering targets |
Brad Lemon, Joseph Hirt, Timothy Welling, James G. Daily, III, David Meendering +5 more |
2016-04-12 |
| 9312177 |
Screen print mask for laser scribe and plasma etch wafer dicing process |
Brad Eaton, Wei-Sheng Lei, James S. Papanu, Ajay Kumar |
2016-04-12 |
