Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412619 | Method of outgassing a mask material deposited over a workpiece in a process tool | Prabhat Kumar, Wei-Sheng Lei, James S. Papanu, Brad Eaton, Ajay Kumar | 2016-08-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412619 | Method of outgassing a mask material deposited over a workpiece in a process tool | Prabhat Kumar, Wei-Sheng Lei, James S. Papanu, Brad Eaton, Ajay Kumar | 2016-08-09 |