Issued Patents 2016
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9527809 | Compound, actinic ray-sensitive or radiation-sensitive resin composition, resist film, and pattern formation method, and method for manufacturing electronic device using same, and electronic device | Natsumi Yokokawa, Shuji Hirano, Wataru Nihashi, Hideaki Tsubaki | 2016-12-27 |
| 9500951 | Actinic ray-sensitive or radiation-sensitive composition, resist film using the same, pattern forming method, method for manufacturing electronic device, and electronic device | Natsumi Yokokawa, Hideaki Tsubaki | 2016-11-22 |
| 9470980 | Pattern-forming method, electron beam-sensitive or extreme ultraviolet radiation-sensitive resin composition, resist film, manufacturing method of electronic device using them and electronic device | Naoki Inoue, Shuji Hirano, Hideaki Tsubaki | 2016-10-18 |
| 9448482 | Pattern forming method, resist pattern formed by the method, method for manufacturing electronic device using the same, and electronic device | Kaoru Iwato, Takanobu Takeda | 2016-09-20 |
| 9448477 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, manufacturing method of electronic device using the same, and electronic device | Takeshi Kawabata, Hideaki Tsubaki | 2016-09-20 |
| 9423690 | Pattern forming method, electron beam-sensitive or extreme ultraviolet ray-sensitive resin composition, resist film, and method for manufacturing electronic device, and electronic device using the same | Shuji Hirano, Natsumi Yokokawa, Wataru Nihashi | 2016-08-23 |
| 9411230 | Pattern forming method, electron beam-sensitive or extreme ultraviolet-sensitive composition, resist film, method for manufacturing electronic device using the same, and electronic device | Kaoru Iwato, Hideaki Tsubaki | 2016-08-09 |
| 9400430 | Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film, mask blank and method of forming pattern | Tomotaka Tsuchimura | 2016-07-26 |
| 9323153 | Actinic ray-sensitive or radiation-sensitive resin composition, and, actinic ray-sensitive or radiation-sensitive film and pattern forming method, each using the same | Shuji Hirano, Hideaki Tsubaki | 2016-04-26 |
| 9323150 | Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film therefrom and method of forming pattern | Shuji Hirano, Hideaki Tsubaki | 2016-04-26 |
| 9291896 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film using the same, pattern forming method, manufacturing method of electronic device, and electronic device | Shuji Hirano, Natsumi Yokokawa, Wataru Nihashi | 2016-03-22 |
| 9291898 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film using the same, pattern forming method, manufacturing method of electronic device, electronic device and resin | Natsumi Yokokawa, Shuji Hirano, Wataru Nihashi | 2016-03-22 |
| 9291897 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device using the same, and electronic device | Shuji Hirano, Natsumi Yokokawa, Wataru Nihashi | 2016-03-22 |