Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9527809 | Compound, actinic ray-sensitive or radiation-sensitive resin composition, resist film, and pattern formation method, and method for manufacturing electronic device using same, and electronic device | Hiroo Takizawa, Shuji Hirano, Wataru Nihashi, Hideaki Tsubaki | 2016-12-27 |
| 9500951 | Actinic ray-sensitive or radiation-sensitive composition, resist film using the same, pattern forming method, method for manufacturing electronic device, and electronic device | Hiroo Takizawa, Hideaki Tsubaki | 2016-11-22 |
| 9423690 | Pattern forming method, electron beam-sensitive or extreme ultraviolet ray-sensitive resin composition, resist film, and method for manufacturing electronic device, and electronic device using the same | Hiroo Takizawa, Shuji Hirano, Wataru Nihashi | 2016-08-23 |
| 9291896 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film using the same, pattern forming method, manufacturing method of electronic device, and electronic device | Shuji Hirano, Hiroo Takizawa, Wataru Nihashi | 2016-03-22 |
| 9291897 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device using the same, and electronic device | Shuji Hirano, Hiroo Takizawa, Wataru Nihashi | 2016-03-22 |
| 9291898 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film using the same, pattern forming method, manufacturing method of electronic device, electronic device and resin | Shuji Hirano, Hiroo Takizawa, Wataru Nihashi | 2016-03-22 |